Method and apparatus for integrating dispatch and process control actions

1. Field of the Invention A method includes scheduling a plurality of workpieces for processing by a plurality of tools. Each workpiece has an associated priority. The processing in at least one of the tools is controlled in accordance with a process control model. A process control request associat...

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Bibliographische Detailangaben

Hauptverfasser:	Purdy, Matthew A, Nicksic, Cabe W
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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