Heterodyne interferometer with a phase modulated source
Most practical interferometers used for precision sensing are based on a concept of heterodyne interferometer due to its high-precision readout afforded by the heterodyne signal processing. However, a typical optical heterodyne interferometer is limited in its resolution to a few nanometers by a par...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!