$On-chip graded index of refraction optical waveguide and damascene method of fabricating the same$

On-chip graded index of refraction optical waveguide and damascene method of fabricating the same

This invention relates to optical waveguides formed in integrated circuit (IC)-like structures and positioned in interconnect layers of the IC-like structure. More particularly, this invention relates to a new and improved optical waveguide formed with a graded index of refraction in an IC-like stru...

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Bibliographische Detailangaben
Hauptverfasser:	Hornbeck, Verne C, Allman, Derryl D. J
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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