Hydroxyphenyl copolymers and photoresists comprising same

1. Field of the Invention The present invention relates to new copolymers and use of such copolymer as a resin binder component for photoresist compositions, particularly chemically-amplified positive-acting resists. Polymers of the invention include repeat units of 1) meta-hydroxystyrene groups, 2)...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Ito, Hiroshi, Pandya, Ashish, Sinta, Roger F
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!