High modulus, low dielectric constant coatings

This invention relates generally to coatings for use in electronic devices. More particularly, the invention relates to coatings having an improved elastic modulus and a low dielectric constant and to methods of making such coatings. Low dielectric constant films with improved elastic modulus. An Si...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Berry, III, Ivan Louis, Chung, Kyuha, Han, Qingyuan, Liu, Youfan, Moyer, Eric Scott, Spaulding, Michael John
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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