Electronic structures with reduced capacitance

Electronic structures with reduced capacitance

This invention relates to passive components integrated on an integrated circuit chip, an integrated circuit carrier, and a circuit board. An apparatus and method is described incorporating one or more layers of SiCOH and one or more layers of patterned conductors in an integrated circuit chip. The...

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Hauptverfasser: Gates, Stephen McConnell, Grill, Alfred
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Sprache:eng
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creator Gates, Stephen McConnell
Grill, Alfred
description This invention relates to passive components integrated on an integrated circuit chip, an integrated circuit carrier, and a circuit board. An apparatus and method is described incorporating one or more layers of SiCOH and one or more layers of patterned conductors in an integrated circuit chip. The invention overcomes the problem of capacitance by lowering the k of the delectric and overcomes the problem of breakdown voltage and the leakage curent by tailoring the composition of SiCOH.
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title Electronic structures with reduced capacitance
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