Array foreshortening measurement using a critical dimension scanning electron microscope

1. Field of the Invention A method and system for measuring lithographic image foreshortening. The method comprises the steps of providing a critical dimension scanning electron microscope, and using that critical dimension scanning electron microscope to measure lithographic image foreshortening. P...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Bowley, Jr., Reginald R, Fisch, Emily E, Meunier, Debra L
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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