Contamination resistant cyclic olefin container

The present invention relates to containers made of thermoplastic resins, and particularly to containers made of thermoplastic resins which are suitable for carrying wafers for the production of semiconductors in the production steps of semiconductors and which are inhibited from contamination of th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Otoi, Kenji, Suzuki, Teruhiko
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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