User configurable multivariate time series reduction tool control method

1. Field of the Invention A method and structure for controlling a manufacturing tool includes measuring different manufacturing parameters of the tool, transforming a plurality of time series of the manufacturing parameters into intermediate variables based on restrictions and historical reference...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Bunkofske, Raymond J, Colt, Jr., John Z, McGill, James J, Pascoe, Nancy T, Surendra, Maheswaran, Taubenblatt, Marc A, Ghias, Asif
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!