Belt wiper for a chemical mechanical planarization system

1. Field of the Invention A belt wiper that can be used in a linear belt-type chemical mechanical planarization (CMP) system to maintain a belt pad is provided. The belt wiper mitigates disturbances within a detection region important to a belt pad steering system. Also, the belt wiper mitigates the...

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Bibliographische Detailangaben

Hauptverfasser:	Taylor, Travis R, DiPietro, Christian, Jew, Stephen, Ngoon, Philip, Ramanujam, Katgenahalli Y, Luong, Tony
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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