Scanning electron microscope

1. Field of the Invention A scanning electron microscope is provided which is capable of efficiently detecting ions, such as primary electron excitation ions, reflection electron excitation ions or secondary electron excitation ions caused by a bias electric field, thereby obtaining an absorption cu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Dan, Yukari, Tamochi, Ryuichiro, Sato, Mitsugu
Format: Patent
Sprache:eng
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