Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same
The present invention relates to a micro-machined thin film gas sensor device, and a method of making and using the same. More specifically, the present invention relates to solid-state sensor arrays for the detection of H , NH , and sulfur containing gases. The present invention provides a hydrogen...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!