Production of ternary shape-memory alloy films by sputtering using a hot pressed target

Production of ternary shape-memory alloy films by sputtering using a hot pressed target

This invention relates to a method of producing ternary shape-memory alloy films by sputtering process techniques. In particular it relates to a method of producing shape-memory nickel titanium hafnium films using hot pressed metal targets in the sputtering process. A method for producing thin film...

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Hauptverfasser: Rasmussen, Gregory Keller, Chang, Fenglian, Zhang, Jinping, Gold, Terry Jack
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Sprache:eng
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creator Rasmussen, Gregory Keller
Chang, Fenglian
Zhang, Jinping
Gold, Terry Jack
description This invention relates to a method of producing ternary shape-memory alloy films by sputtering process techniques. In particular it relates to a method of producing shape-memory nickel titanium hafnium films using hot pressed metal targets in the sputtering process. A method for producing thin film deposits of ternary shape-memory alloys using an ion sputtering deposition process comprising using a hot pressed metal powder composition target.
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In particular it relates to a method of producing shape-memory nickel titanium hafnium films using hot pressed metal targets in the sputtering process. 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In particular it relates to a method of producing shape-memory nickel titanium hafnium films using hot pressed metal targets in the sputtering process. A method for producing thin film deposits of ternary shape-memory alloys using an ion sputtering deposition process comprising using a hot pressed metal powder composition target.</abstract><oa>free_for_read</oa></addata></record>
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title Production of ternary shape-memory alloy films by sputtering using a hot pressed target
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