Multiple local probe measuring device and method

The present invention concerns a multiple local probe measuring device for effecting local measurements referring to a sample, a multiple local probe measuring method and a multiple local probe manipulation method. One application field of the novel device and the novel methods is the scanning force microscopy (SFM), also known as atomic force microscopy (AFM). However, the invention is not restricted to such an application. The basic concept is applicable to the whole range of local probe techniques developed so far, especially all other scanning probe microscopy (SPM) techniques which require stabilization of measurement conditions, e.g. distance relations, for microscope probes, possibly cantilevers, for high-resolution measurements. Since it is hardly possible to give a complete list of scanning probe microscope techniques to which the invention can be applied, only some important techniques are given: scanning tunneling microscopy (STM), magnetic force microscopy (MFM), scanning near-field. optical microscopy (SNOM), lateral force microscopy (LFM), electrical field/force microscopy (EFM), magneto-tunneling microscopy and spin sensitive tunneling microscopy. The invention provides a local probe measuring device for effecting local measurements refering to a sample, comprising a plurality of local probes for local measurements with respect to a sample or a reference surface, a measurement condition adjustment arrangement adapted to commonly adjust measurement conditions of said local probes with respect to the sample or the reference surface, a plurality of detection arrangements, each being associated or adapted to be associated to one particular of said local probes and adapted to independently detect measurement data refering to local measurements effected by said particular local probe. Further, methods for effecting local measurements and local manipulations by means of multiple local probes are provided.