Method for forming split-gate flash cell for salicide and self-align contact

(1) Field of the Invention A method is disclosed for forming a split-gate flash memory cell having a salicidated control gate and self-aligned contacts. Salicidation is normally performed with single gate devices, such as logic devices. In a split-gate where the control gate overlays the floating ga...

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Hauptverfasser:	Sung, Hung-Cheng, Kuo, Di-Son, Hsieh, Chia-Ta
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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