Beam evaluation
The invention relates to a method for evaluating a charged particle beam and a method for controlling a charged particle beam. Furthermore, this invention relates to an apparatus for the examination of specimen with a beam of charged particles. The present invention provides, according to a first as...
Gespeichert in:
| Hauptverfasser: | , , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!