Wafer scrubbing brush core

1. Field of the Invention A brush core and the method for making a brush core for use in substrate scrubbing are provided. The substrate can be any substrate that may need to undergo a scrubbing operation to complete a cleaning operation, etching operation, or other preparation. For instance, the su...

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Bibliographische Detailangaben

Hauptverfasser:	Dickey, Tanlin, Svirchevski, Julia S, Anderson, Donald E, Ravkin, Mike, Treichel, Helmuth W, Pascal, Roy Winston, Gardner, Douglas S
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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