Two-stage roughing and controlled deposition rates for fabricating laser ablation masks

The invention relates generally to methods and systems for fabricating laser ablation masks and more particularly to approaches to evacuating a vacuum chamber and depositing layers during the fabrication of such masks. A method of fabricating a high energy radiation mask, such as a laser ablation ma...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Lee, Lawrence Hakchu
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!