Positionable multiple detector system for spectrophotomer, ellipsometer, polarimeter and systems, and methodology of use

Positionable multiple detector system for spectrophotomer, ellipsometer, polarimeter and systems, and methodology of use

The present invention relates to detector systems, and more particularly to sequentially positionable, multiple detector systems in spectrophotometer, ellipsometer and polarimeter systems. The present invention also includes methods of use wherein different detector systems are utilized during diffe...

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Hauptverfasser: Green, Steven E, Cooney, Gerald
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Cooney, Gerald
description The present invention relates to detector systems, and more particularly to sequentially positionable, multiple detector systems in spectrophotometer, ellipsometer and polarimeter systems. The present invention also includes methods of use wherein different detector systems are utilized during different data acquisition, system calibration and/or component alignment procedures. Disclosed are spectrophotometer, polarimeter, and ellipsometer systems which have multiple easily, sequentially, positionable detector systems therein mounted to allow easy positioning thereof, to for instance, allow sequential monitoring of ellipsometric and spectrophotometric signals, without removal of any detector system from the spectrophotometer, polarimeter, or ellipsometer system. Also disclosed are methods of use wherein-different detectors in a positionable multiple detector containing system are utilized during different electromagnetic beam detection steps.
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Inc</creatorcontrib><description>The present invention relates to detector systems, and more particularly to sequentially positionable, multiple detector systems in spectrophotometer, ellipsometer and polarimeter systems. The present invention also includes methods of use wherein different detector systems are utilized during different data acquisition, system calibration and/or component alignment procedures. Disclosed are spectrophotometer, polarimeter, and ellipsometer systems which have multiple easily, sequentially, positionable detector systems therein mounted to allow easy positioning thereof, to for instance, allow sequential monitoring of ellipsometric and spectrophotometric signals, without removal of any detector system from the spectrophotometer, polarimeter, or ellipsometer system. 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Inc</creatorcontrib><title>Positionable multiple detector system for spectrophotomer, ellipsometer, polarimeter and systems, and methodology of use</title><description>The present invention relates to detector systems, and more particularly to sequentially positionable, multiple detector systems in spectrophotometer, ellipsometer and polarimeter systems. The present invention also includes methods of use wherein different detector systems are utilized during different data acquisition, system calibration and/or component alignment procedures. Disclosed are spectrophotometer, polarimeter, and ellipsometer systems which have multiple easily, sequentially, positionable detector systems therein mounted to allow easy positioning thereof, to for instance, allow sequential monitoring of ellipsometric and spectrophotometric signals, without removal of any detector system from the spectrophotometer, polarimeter, or ellipsometer system. 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Disclosed are spectrophotometer, polarimeter, and ellipsometer systems which have multiple easily, sequentially, positionable detector systems therein mounted to allow easy positioning thereof, to for instance, allow sequential monitoring of ellipsometric and spectrophotometric signals, without removal of any detector system from the spectrophotometer, polarimeter, or ellipsometer system. Also disclosed are methods of use wherein-different detectors in a positionable multiple detector containing system are utilized during different electromagnetic beam detection steps.</abstract><oa>free_for_read</oa></addata></record>
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title Positionable multiple detector system for spectrophotomer, ellipsometer, polarimeter and systems, and methodology of use
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