Lithographic projection apparatus having a temperature controlled heat shield

1. Field of the Invention In a lithographic projection apparatus a first part is shielded from a second part by a heat shield. The first part is required to have a temperature of a predetermined value and the second part has a characteristic that may influence the temperature of the first part. The...

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Bibliographische Detailangaben

Hauptverfasser:	Loopstra, Erik R, Kwan, Yim Bun P, Muitjens, Marcel J. E. H, De Vrieze-Voorn, Sonja T
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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