Lithographic projection apparatus having a temperature controlled heat shield

Lithographic projection apparatus having a temperature controlled heat shield

1. Field of the Invention In a lithographic projection apparatus a first part is shielded from a second part by a heat shield. The first part is required to have a temperature of a predetermined value and the second part has a characteristic that may influence the temperature of the first part. The...

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Hauptverfasser: Loopstra, Erik R, Kwan, Yim Bun P, Muitjens, Marcel J. E. H, De Vrieze-Voorn, Sonja T
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Sprache:eng
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creator Loopstra, Erik R
Kwan, Yim Bun P
Muitjens, Marcel J. E. H
De Vrieze-Voorn, Sonja T
description 1. Field of the Invention In a lithographic projection apparatus a first part is shielded from a second part by a heat shield. The first part is required to have a temperature of a predetermined value and the second part has a characteristic that may influence the temperature of the first part. The characteristic may be a temperature deviating from the predetermined value, or a supply of radiation that may deviate the temperature of the first part from the predetermined value when incident on the first part. Heat shield temperature controlling means are provided to control a temperature of the heat shield to the predetermined value.
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title Lithographic projection apparatus having a temperature controlled heat shield
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