Heat-relaxable substrates and arrays

The present invention relates to heat-relaxable substrates. More particularly, the present invention provides high density arrays on heat-relaxable substrates, along with methods and apparatus for relaxing substrates using electromagnetic energy. Articles, such as high density arrays, on heat-relaxa...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Patil, Sanjay L, Duan, Daniel C, Halverson, Kurt J, LePere, Pierre H
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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