Heat-relaxable substrates and arrays

The present invention relates to heat-relaxable substrates. More particularly, the present invention provides high density arrays on heat-relaxable substrates, along with methods and apparatus for relaxing substrates using electromagnetic energy. Articles, such as high density arrays, on heat-relaxa...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Patil, Sanjay L, Duan, Daniel C, Halverson, Kurt J, LePere, Pierre H
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention relates to heat-relaxable substrates. More particularly, the present invention provides high density arrays on heat-relaxable substrates, along with methods and apparatus for relaxing substrates using electromagnetic energy. Articles, such as high density arrays, on heat-relaxable substrates that can be relaxed by exposure to thermal energy are disclosed, along with methods of manufacturing the arrays, and systems/apparatus for relaxing arrays using electromagnetic energy. The arrays may themselves include electromagnetic energy sensitive material in their construction, in which case exposure of the arrays to suitable electromagnetic energy can provide the thermal energy required to cause the arrays to relax. In other embodiments, the arrays may not include an electromagnetic energy sensitive material in their construction, in which case the arrays may be heated indirectly, i.e., by locating the arrays within a system or apparatus that includes an electromagnetic energy sensitive material and transferring the thermal energy from the electromagnetic energy sensitive material to the array by, e.g., conduction.