X-ray generator, X-ray inspector and X-ray generation method

1. Field of the Invention An X-ray generator, an X-ray inspector and an X-ray generation method capable of automatically focusing an energy beam, such as an electron beam for generating an X-ray, on a target are provided. The generation, inspector and the method have been developed by turning an att...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Yamada, Koichi, Tanigaki, Takeshige
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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