Method of an apparatus for obtaining neutral dissociated gas atoms

The present invention relates generally to a method of and apparatus for obtaining electrically neutral gas atoms from ionizable gas molecules including the atoms and, more particularly, to such a method and apparatus wherein the gas molecules are converted into a plasma by plural oscillating electr...

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Bibliographische Detailangaben

Hauptverfasser:	Ni, Tuqiang, Collison, Wenli
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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