Method for improving adhesion

The invention relates to ink jet printers and to improved methods for making printheads for ink jet printers. The invention provides a method for improving adhesion between a polymeric planarizing film and a semiconductor chip surface. The method includes deposition resistive, conductive and/or insu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Mrvos, James Michael, Sullivan, Carl Edmond
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention relates to ink jet printers and to improved methods for making printheads for ink jet printers. The invention provides a method for improving adhesion between a polymeric planarizing film and a semiconductor chip surface. The method includes deposition resistive, conductive and/or insulative materials to a seimconductor chip surface to provide a semiconductor chip for an ink jet printer. The chip surface is treated with a dry etch process under an oxygen atmosphere for a period of time and under conditions sufficient to activate the surface of the chip. A polymeric planarizing film is applied to the activated surface of the semiconductor chip. As a result of the dry etch process, adhesion of the planarizing film is increased over adhesion between the planarizing film and a semiconductor surface in the absence of the dry etch treatment of the chip surface.