Vapor deposition coating apparatus

This invention relates to a vapor deposition coating apparatus. More particularly it relates to an apparatus in which the ion current density is carefully controlled to improve coating. This control enhances the versatility and enlarges the range of deposition conditions which can be achieved within...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Monaghan, Dermot Patrick
Format: Patent
Sprache:eng
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