Method and apparatus for inspecting high-precision patterns
1. Field of the Invention A device and method for inspecting a test piece with a laser beam in which the laser beam is divided into plural beams, and each of the plural beams has an identification marker, such as a particular polarity or intensity. Each of the marked beams, scans a different portion...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | 1. Field of the Invention
A device and method for inspecting a test piece with a laser beam in which the laser beam is divided into plural beams, and each of the plural beams has an identification marker, such as a particular polarity or intensity. Each of the marked beams, scans a different portion of the test piece to reduce the time needed to inspect the test piece. |
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