Plates for vacuum thermal fusion

The present invention relates to fusion bonding, particularly to vacuum fusion bonding, and more particularly to a process involving vacuum pull down that enables increasing the bonding temperature to produce enhanced bonding. A process for effectively bonding arbitrary size or shape substrates. The...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Davidson, James C, Balch, Joseph W
Format: Patent
Sprache:eng
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