Solder bump measuring method and apparatus

1. Field of the Invention A work having a number of solder bumps on a substrate is mounted on a work positioning mechanism, and scanned by an optical micro head to measure errors of a mount posture of the work. Each stage is controlled to correct the errors, and thereafter, the apex positions of the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Hashimoto, Yutaka, Sasaki, Hideaki, Kobayashi, Mamoru, Kazui, Shinichi
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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