Reticle SMIF pod in situ orientation

Reticle SMIF pod in situ orientation

The present invention relates to a SMIF pod and more particularly, to reticle SMIF pod in situ orientation. A reticle SMIF pod for in situ orientation comprises a pod door. A pod cover is removably receivable on the door to define an interior space. A nest assembly has a plate resting on the pod doo...

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1. Verfasser: Neary, Timothy E
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creator Neary, Timothy E
description The present invention relates to a SMIF pod and more particularly, to reticle SMIF pod in situ orientation. A reticle SMIF pod for in situ orientation comprises a pod door. A pod cover is removably receivable on the door to define an interior space. A nest assembly has a plate resting on the pod door in the interior space and a core extending downwardly from the plate through an opening in the pod door. The plate is rotatably mounted on the pod door to selectively orient a reticle supported on the plate, in use. Alignment legs or tabs align the plate relative to the pod door in one of plural orthogonal positions.
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title Reticle SMIF pod in situ orientation
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