Polishing machines including under-pads and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces

Polishing machines and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces are disclosed herein. In one embodiment, a machine includes a table having a support surface, an under-pad carried by the support surface, and a workpiece carrier assembly over the table. Th...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: Elledge, Jason
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator Elledge, Jason
description Polishing machines and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces are disclosed herein. In one embodiment, a machine includes a table having a support surface, an under-pad carried by the support surface, and a workpiece carrier assembly over the table. The under-pad has a cavity and the carrier assembly is configured to carry a microfeature workpiece. The machine further includes a magnetic field source configured to generate a magnetic field in the cavity and a magnetorheological fluid in the cavity. The magnetorheological fluid changes viscosity within the cavity under the influence of the magnetic field source. It is emphasized that this Abstract is provided to comply with the rules requiring an abstract. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
format Patent
fullrecord <record><control><sourceid>uspatents_EFI</sourceid><recordid>TN_cdi_uspatents_applications_20040214514</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>20040214514</sourcerecordid><originalsourceid>FETCH-uspatents_applications_200402145143</originalsourceid><addsrcrecordid>eNqVjL0KwjAUhbs4iPoOWR2Kba1PIIqjg3u5JDcmmNyE3AR3n9wURFydzs93OMvmdQ3OsrF0Fx5kVWRhSbqi5qqQwtRGUCyAlPCYTaheh1S9NEBWgpvRrjbSoJ9z-4Pi9z1oUWkKGiGXhOIZ0iNalMjrZqHBMW4-umq259PteGkLR8hImSeI0dW_bAPxNHTd2A39eOjH_T_bN3u7Ua4</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Polishing machines including under-pads and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces</title><source>USPTO Published Applications</source><creator>Elledge, Jason</creator><creatorcontrib>Elledge, Jason</creatorcontrib><description>Polishing machines and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces are disclosed herein. In one embodiment, a machine includes a table having a support surface, an under-pad carried by the support surface, and a workpiece carrier assembly over the table. The under-pad has a cavity and the carrier assembly is configured to carry a microfeature workpiece. The machine further includes a magnetic field source configured to generate a magnetic field in the cavity and a magnetorheological fluid in the cavity. The magnetorheological fluid changes viscosity within the cavity under the influence of the magnetic field source. It is emphasized that this Abstract is provided to comply with the rules requiring an abstract. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.</description><language>eng</language><creationdate>2004</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040214514$$EPDF$$P50$$Guspatents$$Hfree_for_read</linktopdf><link.rule.ids>230,308,780,873,885,64059</link.rule.ids><linktorsrc>$$Uhttps://patentcenter.uspto.gov/applications/10425467$$EView_record_in_USPTO$$FView_record_in_$$GUSPTO$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Elledge, Jason</creatorcontrib><title>Polishing machines including under-pads and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces</title><description>Polishing machines and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces are disclosed herein. In one embodiment, a machine includes a table having a support surface, an under-pad carried by the support surface, and a workpiece carrier assembly over the table. The under-pad has a cavity and the carrier assembly is configured to carry a microfeature workpiece. The machine further includes a magnetic field source configured to generate a magnetic field in the cavity and a magnetorheological fluid in the cavity. The magnetorheological fluid changes viscosity within the cavity under the influence of the magnetic field source. It is emphasized that this Abstract is provided to comply with the rules requiring an abstract. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.</description><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2004</creationdate><recordtype>patent</recordtype><sourceid>EFI</sourceid><recordid>eNqVjL0KwjAUhbs4iPoOWR2Kba1PIIqjg3u5JDcmmNyE3AR3n9wURFydzs93OMvmdQ3OsrF0Fx5kVWRhSbqi5qqQwtRGUCyAlPCYTaheh1S9NEBWgpvRrjbSoJ9z-4Pi9z1oUWkKGiGXhOIZ0iNalMjrZqHBMW4-umq259PteGkLR8hImSeI0dW_bAPxNHTd2A39eOjH_T_bN3u7Ua4</recordid><startdate>20041028</startdate><enddate>20041028</enddate><creator>Elledge, Jason</creator><scope>EFI</scope></search><sort><creationdate>20041028</creationdate><title>Polishing machines including under-pads and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces</title><author>Elledge, Jason</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-uspatents_applications_200402145143</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2004</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Elledge, Jason</creatorcontrib><collection>USPTO Published Applications</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Elledge, Jason</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Polishing machines including under-pads and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces</title><date>2004-10-28</date><risdate>2004</risdate><abstract>Polishing machines and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces are disclosed herein. In one embodiment, a machine includes a table having a support surface, an under-pad carried by the support surface, and a workpiece carrier assembly over the table. The under-pad has a cavity and the carrier assembly is configured to carry a microfeature workpiece. The machine further includes a magnetic field source configured to generate a magnetic field in the cavity and a magnetorheological fluid in the cavity. The magnetorheological fluid changes viscosity within the cavity under the influence of the magnetic field source. It is emphasized that this Abstract is provided to comply with the rules requiring an abstract. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_uspatents_applications_20040214514
source USPTO Published Applications
title Polishing machines including under-pads and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-25T23%3A40%3A28IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-uspatents_EFI&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Elledge,%20Jason&rft.date=2004-10-28&rft_id=info:doi/&rft_dat=%3Cuspatents_EFI%3E20040214514%3C/uspatents_EFI%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true