Temperature control systems for excimer lasers

Improved temperature stabilization can be obtained for pulsed gas discharge laser systems, such as excimer laser systems, using information about the energy dissipation of the system. Temperature sensors have a limited response time, which can lead to undesirable instability in gas temperature. By d...

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Bibliographische Detailangaben

1. Verfasser:	Paetzel, Rainer
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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