Device for the detection of substrates stacked with a specific spacing

For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the mea...

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Bibliographische Detailangaben

Hauptverfasser:	Barriss, Louise, Gilchrist, Ulysses, Raue, Hagen, Lahne, Berndt, Heinze, Manfred, Konig, Joachim, Schultz, Klaus
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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