Biaxial liner-revolving position control and table system using the same

A biaxial linear-revolving guide unit is disclosed, which is comprised of a pair of linear motion guide units each composed of a guide rail and a slider fit over the guide rail, and a revolving bearing installed between the linear motion guide units to joint them for revolving movement relative to o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Kanehira, Masayuki
Format: Patent
Sprache:eng
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