Magnetron with controlled DC power

Magnetron with controlled DC power

A magnetron with mechanisms for smoothly and continuously adjusting a DC power applied to its targets to compensate for the changes in the sputtering characteristics of the targets that occur with target aging. A magnetron according to the present teachings includes a set of concentric targets for s...

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Hauptverfasser: Oshmyansky, Yury, Mishin, Sergey, Ruby, Richard, Larson, John
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Sprache:eng
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creator Oshmyansky, Yury
Mishin, Sergey
Ruby, Richard
Larson, John
description A magnetron with mechanisms for smoothly and continuously adjusting a DC power applied to its targets to compensate for the changes in the sputtering characteristics of the targets that occur with target aging. A magnetron according to the present teachings includes a set of concentric targets for sputtering a film onto a wafer in response to an AC power and a DC power applied to the targets and a power controller that adjusts the DC power. The adjustments to the DC power enable the magnetron to maintain uniformity in the thicknesses of films formed with the magnetron throughout the life of its targets.
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A magnetron according to the present teachings includes a set of concentric targets for sputtering a film onto a wafer in response to an AC power and a DC power applied to the targets and a power controller that adjusts the DC power. The adjustments to the DC power enable the magnetron to maintain uniformity in the thicknesses of films formed with the magnetron throughout the life of its targets.</abstract><oa>free_for_read</oa></addata></record>
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title Magnetron with controlled DC power
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