Method of manufacturing semiconductor local interconnect and contact

An integrated circuit, and manufacturing method therefor, is provided. A gate dielectric and a gate are provided respectively on and over a semiconductor substrate. A junction is formed adjacent the gate dielectric and a shaped spacer is formed around the gate. A spacer is formed under the shaped sp...

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Hauptverfasser: Chen, Tong, Yelehanka, Pradeep, Han, Zhi, Zheng, Jia, Ong, Kelvin, Gu, Tian, Cheah, Syn
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Sprache:eng
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creator Chen, Tong
Yelehanka, Pradeep
Han, Zhi
Zheng, Jia
Ong, Kelvin
Gu, Tian
Cheah, Syn
description An integrated circuit, and manufacturing method therefor, is provided. A gate dielectric and a gate are provided respectively on and over a semiconductor substrate. A junction is formed adjacent the gate dielectric and a shaped spacer is formed around the gate. A spacer is formed under the shaped spacer and a liner is formed under the spacer. A first dielectric layer is formed over the semiconductor substrate, the shaped spacer, the spacer, the liner, and the gate. A second dielectric layer is formed over the first dielectric layer. A local interconnect opening is formed in the second dielectric layer down to the first dielectric layer. The local interconnect opening in the first dielectric layer is opened to expose the junction in the semiconductor substrate and the first gate. The local interconnect openings in the first and second dielectric layers are filled with a conductive material.
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title Method of manufacturing semiconductor local interconnect and contact
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