Systems and methods utilizing laser discharge electrodes with ceramic spoilers

Arcing can be minimized in a discharge chamber of an excimer or molecular fluorine laser system by utilizing an improved electrode structure. An electrode structure can include at least one ceramic spoiler positioned near the discharge region of the electrode. An insulating ceramic spoiler can reduc...

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Bibliographische Detailangaben

Hauptverfasser:	Bragin, Igor, Berger, Vadim, Melnikov, Oleg, Aab, Konstantin, Baumler, Juergen
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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