Method for producing thin film sensors, especially hot film anemometters and humidity sensors

A method for producing thin film sensors that includes applying a sensor structure to a front of a glass substrate so as to define a combination, connecting a support on a front of the combination. The method further includes removing a portion of the glass substrate over a large surface from a dire...

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1. Verfasser:	Timelthaler, Wolfgang
Format:	Patent
Sprache:	eng
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creator	Timelthaler, Wolfgang
description	A method for producing thin film sensors that includes applying a sensor structure to a front of a glass substrate so as to define a combination, connecting a support on a front of the combination. The method further includes removing a portion of the glass substrate over a large surface from a direction directed from a back of the combination down to a final thickness (d) of the glass substrate and releasing a connection between the support and the combination.
format	Patent
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title	Method for producing thin film sensors, especially hot film anemometters and humidity sensors
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