APPARATUS AND TECHNIQUES FOR SCANNING ELECTRON BEAM BASED CHIP REPAIR

A method and apparatus for editing an integrated circuit by bombarding a feature in need of editing with either a low-energy or high-energy electron beam in the presence of a gas whereby low energy electrons activate reactants adsorbed on the surface of the feature in need of editing to form active...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Shore, Aaron, Marchman, Herschel
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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