Electron microscope, method for operating the same, and computer-readable medium

An electron microscope comprises a specimen designating section for designating a characteristic of a specimen, a simplified image observation condition setting section for setting one image observation conditions out of a plurality of simplified image observation conditions, which were set previous...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Furukawa, Hiroshi, Hirata, Tomohiko
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An electron microscope comprises a specimen designating section for designating a characteristic of a specimen, a simplified image observation condition setting section for setting one image observation conditions out of a plurality of simplified image observation conditions, which were set previously to contain setting of a degree of vacuum, based on the characteristic of the specimen, and a preview setting section for setting a preview function that forms a plurality of simplified observation images simply based on a plurality of different simplified image observation conditions and displays them on a display section. A preview function of forming simply a plurality of observation images based on a plurality of image observation conditions containing a degree of vacuum as a parameter and then displaying them in a second display area is executed.