Electron microscope, method for operating the same, and computer-readable medium
An electron microscope comprises a specimen designating section for designating a characteristic of a specimen, a simplified image observation condition setting section for setting one image observation conditions out of a plurality of simplified image observation conditions, which were set previous...
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Sprache: | eng |
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Zusammenfassung: | An electron microscope comprises a specimen designating section for designating a characteristic of a specimen, a simplified image observation condition setting section for setting one image observation conditions out of a plurality of simplified image observation conditions, which were set previously to contain setting of a degree of vacuum, based on the characteristic of the specimen, and a preview setting section for setting a preview function that forms a plurality of simplified observation images simply based on a plurality of different simplified image observation conditions and displays them on a display section. A preview function of forming simply a plurality of observation images based on a plurality of image observation conditions containing a degree of vacuum as a parameter and then displaying them in a second display area is executed. |
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