METHOD FOR DENSE PIXEL FABRICATION AND PRODUCT THEREOF

A method of fabricating a dense pixel array comprising the steps of: (a) printing a photoresist mask and applying said mask to a semiconductor material substrate to form a masked area and an unmasked area on said substrate; (b) applying a photoresist material layer to the unmasked area of the substr...

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Bibliographische Detailangaben
1. Verfasser: F. DePaulis, Lawrence
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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