Test photomask, flare evaluation method, and flare compensation method

Test photomask, flare evaluation method, and flare compensation method

Through use of a line pattern which becomes a pattern under measurement and a zone pattern in a zonal shape which becomes a flare causing pattern forming a light transmission region which surrounds the line pattern and causes local flare to occur on the line pattern, the effect of the local flare du...

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Hauptverfasser: Hanyu, Isamu, Yao, Teruyoshi, Kirikoshi, Katsuyoshi
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Sprache:eng
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creator Hanyu, Isamu
Yao, Teruyoshi
Kirikoshi, Katsuyoshi
description Through use of a line pattern which becomes a pattern under measurement and a zone pattern in a zonal shape which becomes a flare causing pattern forming a light transmission region which surrounds the line pattern and causes local flare to occur on the line pattern, the effect of the local flare due to the zone pattern on the line pattern is measured as a line width of the line pattern for evaluation. Further, this measurement value is used to compensate the effect of the local flare on each real pattern.
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title Test photomask, flare evaluation method, and flare compensation method
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