Etchant and method of etching

An etchant for patterning thin metal films by wet etching and in particular, an etchant for use in producing semiconductor devices, such as semiconductor elements and liquid-crystal display elements, is for application to a multilayer film having a first layer made of aluminum or an aluminum alloy h...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Yoshida, Takuji, Saitou, Noriyuki, Inoue, Kazunori, Ishikawa, Makoto, Kamiharaguchi, Yoshio
Format: Patent
Sprache:eng
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