Loading and unloading station for semiconductor processing installations

In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are op...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Scheler, Werner, Mages, Andreas, Blaschitz, Herbert, Schulz, Alfred, Schneider, Heinz
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!