Calibration standard for high resolution electron microscopy

A method and apparatus used to calibrate high-resolution electron microscopes where a single standard provides multiple samples, each having a different atomic structure, permits rapid accurate calibration of the entire range of magnifications. The different atomic structure dimensions possess known...

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Hauptverfasser: Vartuli, Catherine, Houge, Erik, Mclntosh, John, Stevie, Fred
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Sprache:eng
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creator Vartuli, Catherine
Houge, Erik
Mclntosh, John
Stevie, Fred
description A method and apparatus used to calibrate high-resolution electron microscopes where a single standard provides multiple samples, each having a different atomic structure, permits rapid accurate calibration of the entire range of magnifications. The different atomic structure dimensions possess known reference measurement data. The S/TEM is adjusted to focus onto the crystal lattice structure of each sample in a selected sequence. Measurements of these lattice spacings are compared to known dimensions. If S/TEM measurements do not agree with the lattice spacing dimensions, the S/TEM magnification is adjusted to reflect known dimensions. Typical standard exchange and associated processing steps are eliminated by the use of the single standard comprising of a plurality of samples.
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title Calibration standard for high resolution electron microscopy
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