Clustering for data compression

An improved profileometry data collection and analysis system employing software that performs clustering analysis on library data stored in memory that represent semiconductor chip wafer profiles, for use in matching real-time data signals from data collected by profileometry instruments. To better...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Doddi, Srinivas
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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