Method and apparatus for determining two dimensional doping profiles with SIMS

A method of forming a SIMS monitor device for determining a doping profile of a semiconductor device structure including providing a plurality of regularly repeating semiconductor structures including a doping profile to form a monitor device including at least one layer of the regularly repeating s...

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Hauptverfasser:	Liu, Chin-Kai, Chiou, Jun-Yean, Chou, Pei-Fen, Lui, Han-Shun
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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