Moisture passivated planar index-guided VCSEL

Systems and methods of passivating planar index-guided oxide vertical cavity surface emitting lasers (VCSELs) are described. These systems and methods address the unique susceptibility of these devices to damage that otherwise might be caused by moisture intrusion into the etch holes that are used t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kim, Seongsin, Widjaja, Wilson, Xie, Suning
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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