Low thermal expansion ceramic and member for exposure system
A low-thermal-expansion, rigid and wear-resistant ceramic is provided. The low-thermal-expansion ceramic of the invention includes 60 vol % to 99.9 vol % of at least one selected from the group consisting of cordierite, spodumene and eucryptite and 0.1 vol % to 40 vol % of at least one selected from...
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| creator | Arahori, Tadahisa Yoshitomi, Yasuki |
| description | A low-thermal-expansion, rigid and wear-resistant ceramic is provided.
The low-thermal-expansion ceramic of the invention includes 60 vol % to 99.9 vol % of at least one selected from the group consisting of cordierite, spodumene and eucryptite and 0.1 vol % to 40 vol % of at least one selected from the group consisting of carbides, nitrides, borides and silicides of group 4a elements, group 5a elements and group 6a elements, and boron carbide. The ceramic has a porosity of 0.5 % or less and a thermal expansion coefficient, at 10° C. to 40° C., of 1.5×10
−6
/° C. or less. |
| format | Patent |
| fullrecord | <record><control><sourceid>uspatents_EFI</sourceid><recordid>TN_cdi_uspatents_applications_20030100434</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>20030100434</sourcerecordid><originalsourceid>FETCH-uspatents_applications_200301004343</originalsourceid><addsrcrecordid>eNqVzD0KAkEMQOFpLES9Q1oLITpb2i2KhaX9EscsDswfSRb19ip4AavXfLy525_rA-zOkikBPxsVjbVAYKEcA1C5QeZ8ZYGxyhdUnYRBX2qcl242UlJe_bpw6-Ph0p82kzYyLqYDtZZiIPtMddghetwidr7z_9g3lLs27w</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Low thermal expansion ceramic and member for exposure system</title><source>USPTO Published Applications</source><creator>Arahori, Tadahisa ; Yoshitomi, Yasuki</creator><creatorcontrib>Arahori, Tadahisa ; Yoshitomi, Yasuki</creatorcontrib><description>A low-thermal-expansion, rigid and wear-resistant ceramic is provided.
The low-thermal-expansion ceramic of the invention includes 60 vol % to 99.9 vol % of at least one selected from the group consisting of cordierite, spodumene and eucryptite and 0.1 vol % to 40 vol % of at least one selected from the group consisting of carbides, nitrides, borides and silicides of group 4a elements, group 5a elements and group 6a elements, and boron carbide. The ceramic has a porosity of 0.5 % or less and a thermal expansion coefficient, at 10° C. to 40° C., of 1.5×10
−6
/° C. or less.</description><language>eng</language><creationdate>2003</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030100434$$EPDF$$P50$$Guspatents$$Hfree_for_read</linktopdf><link.rule.ids>230,308,780,873,885,64059</link.rule.ids><linktorsrc>$$Uhttps://patentcenter.uspto.gov/applications/10257027$$EView_record_in_USPTO$$FView_record_in_$$GUSPTO$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Arahori, Tadahisa</creatorcontrib><creatorcontrib>Yoshitomi, Yasuki</creatorcontrib><title>Low thermal expansion ceramic and member for exposure system</title><description>A low-thermal-expansion, rigid and wear-resistant ceramic is provided.
The low-thermal-expansion ceramic of the invention includes 60 vol % to 99.9 vol % of at least one selected from the group consisting of cordierite, spodumene and eucryptite and 0.1 vol % to 40 vol % of at least one selected from the group consisting of carbides, nitrides, borides and silicides of group 4a elements, group 5a elements and group 6a elements, and boron carbide. The ceramic has a porosity of 0.5 % or less and a thermal expansion coefficient, at 10° C. to 40° C., of 1.5×10
−6
/° C. or less.</description><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2003</creationdate><recordtype>patent</recordtype><sourceid>EFI</sourceid><recordid>eNqVzD0KAkEMQOFpLES9Q1oLITpb2i2KhaX9EscsDswfSRb19ip4AavXfLy525_rA-zOkikBPxsVjbVAYKEcA1C5QeZ8ZYGxyhdUnYRBX2qcl242UlJe_bpw6-Ph0p82kzYyLqYDtZZiIPtMddghetwidr7z_9g3lLs27w</recordid><startdate>20030529</startdate><enddate>20030529</enddate><creator>Arahori, Tadahisa</creator><creator>Yoshitomi, Yasuki</creator><scope>EFI</scope></search><sort><creationdate>20030529</creationdate><title>Low thermal expansion ceramic and member for exposure system</title><author>Arahori, Tadahisa ; Yoshitomi, Yasuki</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-uspatents_applications_200301004343</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2003</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Arahori, Tadahisa</creatorcontrib><creatorcontrib>Yoshitomi, Yasuki</creatorcontrib><collection>USPTO Published Applications</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Arahori, Tadahisa</au><au>Yoshitomi, Yasuki</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Low thermal expansion ceramic and member for exposure system</title><date>2003-05-29</date><risdate>2003</risdate><abstract>A low-thermal-expansion, rigid and wear-resistant ceramic is provided.
The low-thermal-expansion ceramic of the invention includes 60 vol % to 99.9 vol % of at least one selected from the group consisting of cordierite, spodumene and eucryptite and 0.1 vol % to 40 vol % of at least one selected from the group consisting of carbides, nitrides, borides and silicides of group 4a elements, group 5a elements and group 6a elements, and boron carbide. The ceramic has a porosity of 0.5 % or less and a thermal expansion coefficient, at 10° C. to 40° C., of 1.5×10
−6
/° C. or less.</abstract><oa>free_for_read</oa></addata></record> |
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| source | USPTO Published Applications |
| title | Low thermal expansion ceramic and member for exposure system |
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